Abstract
We present the results of experimental studies of the modification of the surface layer of grade 316L steel by duplex treatment, including ion-plasma treatment under nitrogen followed by plasma activated chemical vapor deposition of hydrocarbon films doped with silicon and oxygen (a-C:H:SiOx). The mechanical properties of the steel surface (hardness, modulus of elasticity, plasticity index, resistance to plastic deformation) were determined by the nanoindentation method, and the adhesion of the films was evaluated by the scratch test method. The greatest improvement in the mechanical properties of the film–substrate system was observed after the deposition of an a-C:H:SiOx film on a surface preliminarily hardened by ion-plasma treatment in a nitrogen plasma.
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