Abstract
Dimer mobility and dissociation energies of small clusters have been incorporated into a set of rate equations to study the extent of the cluster mobility effect on thin film nucleation kinetics. The numerical analysis results showed that total cluster density and condensation coefficient both increase with increasing dimer dissociation energy and decrease with increasing dimer mobility. By comparison of theoretical calculations with the experimental results of Velfe et al. for Au deposition on NaCl [Thin Solid Films 98 (1982) 15], it is suggested that for this system at 150°C the dimer dissociation energy is low and dimer mobility has little effect on the nucleation kinetics.
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