Abstract
ABSTRACT Piezoelectric micro-cantilever resonant sensor has promising use in gas and bio detection. The effect of DC bias voltage on the resonant frequency of PZT piezoelectric microcantilever is researched. And the analytic equations suitable for multilayer PZT structure are built. At the same time, the laser interference experiment confirms the analytic equations. A second order relationship between the DC bias and the resonant frequency shift can be reached from both the analytic equations and the experiment results. When the DC electrical field is below 1 × 107 V/m, the linear zone exists. This result can benefit to improve the output signal acquisition system so that the resonant frequency measurement can be greatly simplified through DC voltage scanning.
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