Abstract
To prepare TiAlN coatings with excellent performance and obtain the influence law of doping amount on the performance of TiAlN coatings, Cr-doping and Cr-Ni co-doping were carried out under the optimal process parameters of TiAlN by multi-arc ion plating and magnetron sputtering. The paper changed the doping amount of Cr and Cr-Ni by changing doping time of magnetron sputtering, to study the influence of doping amount on phase structure, surface hardness and adhesion TiAlN coatings. The results show that, all the components in the coatings are evenly distributed and doping amount is directly proportional to the doping time, when doping time was 10min, the phase structure of the coating was consistent with of the undoped TiAlN coating. With the increase of doping time, Al-Ni alloy phase and CrN phase began to appear, and the peak strength also increased with the increase of doping amount. The surface hardness of the coating decrease with the increase of doping amount, and binding force of the coating reaches the maximum at the doping time of 30 min, which is about 40N. When doping time continues to increase, the binding force of coating decrease, which is related to the formation of composite coating.
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