Abstract
The growth behaviors and contact resistances of vertically aligned carbon nanotubes(CNTs) and carbon nanofibers (CNFs) grown on different underlayer metals areinvestigated. The average diameter, diameter distribution, density, growth rate andcontact resistance exhibit strong correlation with the choice of catalyst/underlayercombination. These observations are analyzed in terms of interactions between thecatalyst and the underlayer metal. The CNT via test structure has been designedand fabricated to make current–voltage measurements on single CNTs using ananomanipulator under scanning electron microscopy (SEM) imaging. By analyzing thedependence of measured resistance on CNT diameter, the CNT–metal contactresistance can be extracted. The contact resistances between as-grown CNTs anddifferent underlayer metals are determined. Relationships between contact resistancesand various combinations of catalysts and underlayer metals are investigated.
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