Abstract
Casimir had measured the Casimir force through experimental methods, and fitted the empirical formula between the plates. On its basis we analyse that when the gap of two separating surfaces achieves submicron in micro devices, the effect of the Casimir force to the micro-devices is great and this Casimir effect can not be ignored. The results show that: Considering the Casimir force or not, the extreme value of acceleration which can be detected by micro-accelerometer is different, and we have got the specific numerical fitting figure by Matlab .
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