Abstract
Filtered cathode vacuum arc deposition can remove the macroparticles produced from the cathode. Positively biasing the whole filter or inserting a biased plate in the filter can increase the plasma transport efficiency. We developed a curved magnetic filter with rectangular cross-section to improve the coating efficiency. In this study, the effect of biased plates at outer-wall and inner-wall on the transport efficiency of vacuum arc plasma through rectangular curved magnetic filter was investigated. A Langmuir probe system is used to measure the distribution properties of the filtered plasma at 15 places in the outlet plane of the filter. The results showed that a positively biased plate at inner-wall would increase the output ion current density and make the plasma concentrate to the middle of the outlet plane.
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