Abstract
Using the modernized three-electrode ion-plasma sputtering method, homogeneous thin films of FePt and Fe (Pt/Bi) were obtained. Films were deposited on NaCl and glass-ceramic substrates. The film thickness was 120-530 nm. In this case, the calculated cooling rate reached ~ 1012–1014 K/s. The structure of the FePt and Fe (Pt/Bi) films was investigated using X-ray diffraction and electron microscopy methods. It was established that metastable phases were formed in freshly sputtered films, including a supersaturated solid solution, a nanocrystalline and amorphous phases. It was determined that the obtained metastable structures are stable when heated to 540-880 K, depending on the composition. It was established that Bi additives significantly reduce the coercive force of films in the as-sputtered state. It was shown that a heat treatment increased the coercive force up to 36 kA/m in FePt films and up to 10 kA/m in Fe (Pt/Bi) films. The composition of Fe (Pt/Bi) films with a small value of the temperature coefficient of resistance (TCR ~3·10-5 K-1) was determined.
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