The effect of averaging parameters on the backscatter correction

Abstract

The backscatter correction is derived from the knowledge of the backscatter coefficient, indicating the number of backscattered electrons, and from the energy distribution of the backscattered electrons. The effect of variations in the energy distribution on the accuracy of data reduction is minor. Unlike the procedure of Duncumb, newer approaches include the calculation of the backscatter coefficient. Since this parameter has been determined experimentally by various investigators this approach lends itself to a more detailed study of its effect on the correction procedure.The backscatter coefficient varies strongly with the atomic number of the specimen, and less so with the operating voltage and the atomic weight of the elemental target. The effect of atomic weight is always neglected; that of the energy is taken into account in the procedure of Scott et al.The method of averaging the components of a multielement target can have a significant effect on the result when major components differ considerably in the atomic number and element standards are used.