Abstract
The effect of a post-deposition heat treatment at 700 K on the optical properties of sputtered In 2O 3SnO 2 films is investigated. It is found that the refractive index for the samples as prepared increases from 2.0 to about 2.1 for an increase in the partial pressure of oxygen in the sputter gas from 0.003 to 0.13 Pa. After the heat treatment the refractive index shows a constant value of about 2.0, which is the value of the stoichiometric material. It is shown that the decrease in the refraction index can be explained by a relaxation in the lattice constant and may be caused by the diffusion of excess oxygen out of the films during the heat treatment. The shift in the absorption edge due to the heat treatment is explained by a change in the defect structure of the films and should not be attributed to the Burstein effect.
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