Abstract
Multilayered metallic films exhibit property anomalies at layer spacings ≲2nm but it is not known if these are generally associated with structural changes. We are therefore investigating the application of “edge-on” transmission electron microscopical techniques to the examination of films of this type. The observations reported here are of Au/Ag films with modulation wavelengths 19nm and 5nm grown epitaxially on a silver substrate on (001) NaCl using a dual source D.C. magnetron sputter deposition system with a base pressure of 0.06μPa. The longer wavelength (19nm) film was grown at an argon sputtering pressure of 5Pa on a substrate at 250°C, while the shorter wavelength film was grown at 7Pa on a substrate at 160°C. The deposition rates were about 0.5nm sec-1 at a target/substrate separation of 50mm. It can be seen from figures 1 and 2 that in both cases the films have even layer spacings and flat interfaces, except where a few layers of about lnm were introduced into the 5nm wavelength film. The edge-on TEM foils were produced by ion beam thinning at liquid N2, temperatures.
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