Abstract
X-ray diffraction with high spatial resolution is a prerequisite for the characterization of (poly)-crystalline materials on micro- or nanoscopic scales. This can be achieved by utilizing a focused X-ray beam and scanning of the sample. However, due to the penetration of the X-rays into the material, the exact location of diffraction within the sample is ambiguous. Here, we utilize numerical simulations to compute the spatially resolved diffraction volume in order to investigate these ambiguities. We demonstrate that partial depth sensitivity can be achieved by rotating the sample.
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