Abstract
The article describes the development of the atomic force microscope “Terra AFM.” The microscope has been designed and built by the authors as a device for research applications in advanced technologies in industry and in teaching. The modular design of the microscope - the majority of mechanical, electronic and informatics solutions - facilitates the development and introduction of new functionality. Two new modules, correction of piezoelectric scanner nonlinearity and advanced imaging, using the measurement of the amplitude and phase of harmonics of the signal from the probe in the intermittent contact mode, are presented.
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