Abstract
This paper develops an SECS Communication Module, which conforms to SEMI standard, using the Object-oriented Analysis/Design (OOA/D) method. The two main features of SECS Communication Module are Unified Modeling Language (UML) and Design Patterns for developing flexible and reusable software architecture and JAVA program language for implementing SECS Communication Module. The developed SECS communication module can not only be integrated into cluster tool control but can also run stand-alone in a communication equipment.
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