Abstract
This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.
Highlights
Micromachined gyroscopes are a kind of inertial sensors which are used to measure angular rate or attitude angle
Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes
In order to maintain the primary oscillation, various driving circuits are used such as automatic gain control (AGC) to control the amplitude of the driving signal, phase locked loops (PLL) to control the phase of the driving signal and other control circuits to improve the performance of micromachined gyroscopes in the closed-loop drive circuit
Summary
Micromachined gyroscopes are a kind of inertial sensors which are used to measure angular rate or attitude angle. The single chip integrated micromachined gyroscopes have the advantages of reducing the size and interface noise between the mechanical and electronic part. They need more advanced fabrication and package technology, and the cost is higher. Implementation on two separate chips has the advantages of lower cost, fabrication and package simplification, and eases optimization of the mechanical and electronic parts, respectively This implementation is sensitive to outside interference, which decreases the gyroscope accuracy. The emergence of combined surface-bulk micromachining makes it easy to achieve single chip gyroscopes, in which the mechanical and electronic parts are integrated with high sensitivity and low noise in small size [7]. The typical circuitry technologies include the analog circuitry and digital circuitry, while the special circuitry technologies include the sigma delta, mode matching, temperature compensation and quadrature compensation and some other special circuitry technologies
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