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Abstract
A large-stroke precision positioning stage, which includes a planar piezoelectric transducer (PZT) stage and a three-dimensional stepper motor stage is presented here. Stage transfer functions were obtained by experiments. An integral control with gain-scheduling was designed for the PZT stage, while robust loop-shaping control with feed-forward compensation was implemented for the stepper motors. The stages were integrated and a double-layer control structure was designed for the combined stage to allow nanopositioning for long travel. Experiments were then carried out, and the results showed that precision positioning for long strokes could be achieved with our combined stage. Our stage is also suitable for integration with manufacturing modules, such as a two-photon polymerization system for the fabrication of large-scale micro-structures.
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