Abstract
Fourier transform infrared spectroscopy is a widely used instrument to analyze and test different materials including organic and inorganic. Most of current commercial Fourier transform infrared spectrometers are limited in miniaturization and scanning velocity by their macroscopic components. MEMS FTIR spectroscopy is one of the important applications of translational actuator-driven systems by using MEMS technology. The critical component in MEMS FTIRs is the large displacement translating micromirror and its actuator. The paper presents a large displacement and high-surface quality micromirror. The micromirror consists of a micromagnetic actuator and a micromirror plate. The mirror plate and the actuator are fabricated separately and bonded together afterwards, and its size is 3.6 × 3.6 mm2 high-surface quality square mirror plate and a 1cm2 moving part. The microactuator’s moving part is fabricated using MetalMUMPS, and its fixed part includes a ring permanent magnet and a solenoid to realize a large displacement. The mirror plate is fabricated using polished silicon coated with metal layer with high-surface prototypes that are fabricated and experimentally tested. A maximum stroke of 400 μm has been achieved in pull-in whereas only 140 μm stroke have been measured for a 4 to 5-volt DC-controlled displacement, and the resonance frequency is 10 Hz.
Highlights
Fourier transform infrared spectroscopy (FTIRs) is a widely used instrument to analyze and test different materials including organic and inorganic [1]
The FTIRs is based on a two beam Michelson interferometers
Wang et al [15, 16] and Han et al [17] are based on nonresonant electrothermal actuation. These translatory MOEMS devices could be used for instance to adjust an optical path length/optical path difference, something which is of interest for a range of applications, including confocal microscopy, optical coherence tomography, and for FTIR spectroscopy
Summary
Fourier transform infrared spectroscopy (FTIRs) is a widely used instrument to analyze and test different materials including organic and inorganic [1]. High-surface quality and no-resonant displacement of a few hundred micrometers are required for the micromirror [5]. Kung et al and Antila described vertical out-ofplane MEMS mirrors with an electrostatic plate capacitor drive [10, 11] Their results are only 65 μm amplitude and 6 μm for a 6 mm translator mirror. Wang et al [15, 16] and Han et al [17] are based on nonresonant electrothermal actuation These translatory MOEMS devices could be used for instance to adjust an optical path length/optical path difference, something which is of interest for a range of applications, including confocal microscopy, optical coherence tomography, and for FTIR spectroscopy. A maximum stroke of 400 μm has been achieved in pull-in whereas only 140 μm stroke have been measured for a DC-controlled displacement
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