Abstract
The temperature distribution of the integrated gas sensor array is discussed. Since it is difficult to measure the surface temperature on an integrated gas sensor chip experimentally, the finite element analysis (FEA) technique is used in our simulation design of the microstructure gas sensor array. First, the model is derived from the array's exact structure and physical features. Second, we discussed the temperature distribution under steady state of the integrated gas sensor array according to the variances of material properties and the array's structure. Finally, we designed and manufactured a novel integrated gas sensor array based on FEA. The experimental results show that the above-mentioned study is feasible and satisfactory.
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