Abstract

Abstract : Contents: Design Factors; Control Levels; Description of the Clean Room Complex: Plant Layout; Architectural Features; Air Conditioning; Special Utilities; Operation: Personnel Requirements; Security; Entry and Exit Procedures; Equipment Entry and Exit Procedures; Maintenance and Control Procedures: Class III Clean Work Stations; Class II Clean Room; Class I Clean Room; Periodic Maintenance; Special Tests for Contamination; Special Equipment; Maintenance and Cleaning Equipment; Cost.

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