Abstract
We reported a design and fabrication by using microelectro-mechanical-systems (MEMS) processes of a planar 64-channel multielectrode-array (MEA) chip for recording and/or stimulating cells or tissue slice. The 8 multichannels recording system was designed to verify the bioelectronic signal detected from the MEA chip. The active electrode area can be 20 mumx20 mum or 40 mumx40 mum and with 200 mum or 140 mum space between electrodes, and the metal circuit layout is protected by thin silicone dioxide. Then, the DC measurement to prove this MEA chip device can detect bio-electronic signal normally and immersing the MEA chip in the physiological saline buffer solution to verify that the performance in the AC condition.
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