Abstract

This paper presents a unique integration of CMOS flow sensors with two different novel microchannel structures. The design and fabrication of the flow sensors with their integrated microchannels are described. The design of the flow sensors consists of utilizing the layers available in the 2.0 /spl mu/m standard CMOS process. A three resistor anemometer along with a thermocouple is investigated as the structures for the flow sensors. Fabrication of the designs is done through the MOSIS CMOS 2.0 /spl mu/m process. The MEMS flow sensors and microchannels are then completed by using post-processing steps.

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