Abstract
A review of the relationships between film composition, deposition process and properties of sputtered amorphous rare earth-transition metal thin films for magneto-optical recording applications is given. It is shown that to maximize Kerr rotation, anisotropy, corrosion resistance and reflectivity, the sputtering conditions should be selected to produce Zone T featureless microstructure. Although equivalent properties may be achieved with either RF diode or DC magnetron sputtering, DC magnetron sputtering is preferred for manufacturing because of higher deposition rates and lower substrate temperatures. To maximize magnetooptic effects, alloys of Fe and Co should be used as the transition metal. It is shown that perpendicular anisotropy, coercivity, compensation temperature and Curie temperature may be adjusted over a wide range through careful selection of rare earth constituents and Fe/Co ratio. Systematic data on the dependences of the magnetic properties on film composition are given.
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