Abstract
A two-dimensional position sensitive detecting sensor (PSD) based on avalanche breakdown is introduced in this paper. The structure of the sensor is designed under the assumption that the breakdown of the PN junction in the sensor occurs at the bottom of the PN junction. The breakdown structure and characteristics of the sensor are simulated by Medici software and the doping structure and process conditions are calculated by Tsuprem4 software. By using COMSOL Multiphysics, we obtained current allocation of the straight and right angle type electrodes, which is corresponding to the optimal structure. In simulation, the root mean square error of the rectangular-shaped electrode and the straight line-shaped electrode are 0.198, 0.145 respectively. Experiment results show that in the 50% photosensitive area with the center as the origin, the rectangular-shaped electrode error is much smaller than a straight line-shaped electrode and fits in to linear relationship better. But the error of the angle the boundary of the electrode is significantly worse than the line-shaped electrode.
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