Abstract
In this paper, the main factors influencing thermal conductivity of diamond film were analyzed in theory. The thermal conductivity of diamond film was measured by means of the photothermal deflection method. Various crystal structures of diamond films were obtained by synthesis with various deposition methods and conditions. Diamond films synthesized under lower concentration of methane and technique of annealing by MWPCVD method have higher thermal conductivity. Thermal conductivity of diamond film increases with the increasing of removal thickness for the SiC layer on the back of the film. (100)-oriented diamond thick films have higher thermal conductivity.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
