The dependence of the Becker gauge calibration curve on the gas molecular mass

Abstract

The aim of the present work was to study the dependence of calibration curves of the Becker friction vacuum gauge operated in the decremental mode on the kind of the gas (i.e. on its molecular mass). The calibration curves were measured over the range from 10 −1 Pa to atmospheric pressure for the noble gases (He, Ne, Ar, Kr, Xe) and for N 2. The theoretical model of the damping of the ribbon vibration is briefly discussed for the molecular regime. The assumptions of the calibration curve dependence on the gas molecular mass were compared with the experimental results in the molecular and viscous regimes. The experimental results confirm the assumption that the order of the calibration curves for each gas species depends on the molecular mass in the molecular regime while it depends on the gas viscosity in the viscous regime.