Abstract
Targets of 6 mm thickness were prepared from TiO 2 powder with different amounts of Fe 2O 3 and Nd 2O 3 added. The targets were sintered in a vacuum furnace to obtain sub-stoichiometric rutile TiO 2− x . For both added metal oxides, it was found that they were present as titanates forming a second phase. The sputtering behavior of these mixed-oxide targets was investigated. First, the dependence of the discharge voltage and the deposition speed on the argon pressure was measured. Second, the effect of the oxygen addition on the same two parameters was investigated. Both were compared with the dependencies measured for a pure TiO 2− x target. All experiments were performed in constant power mode. The results show that Fe 2O 3 and Nd 2O 3 exhibit different effects on the sputtering behavior of TiO 2− x targets.
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