Abstract

Transparent conductive Co-doped ZnO thin films were deposited by ultrasonic spray technique. Conditions of preparation have been optimized to get good quality. A set of cobalt (Co)-doped ZnO (between 0 and 3wt%) thin films were grown on glass substrate at 350°C. The thin films were annealed at 500°C for improvement of the physical properties. Nanocrystalline films with hexagonal wurtzite structure and a strong (002) preferred orientation were obtained. The maximum value of grain size G=63.99nm is attained with undoped ZnO film. The optical transmissions spectra showed that both the undoped and doped ZnO films have transparency within the visible wavelength region. The band gap energy decreased after doping from 3.367 to 3.319eV when Co concentration increased from 0 to 2wt% with slight increase of electrical conductivity of the films from 7.71 to 8.33(Ωcm)−1. The best estimated structure, optical and electrical results are achieved in Co-doped ZnO film with 2wt%.

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