Abstract
Due to hyperthermal particle energies, extremely high pulse deposition, and quenching rates the pulsed laser deposition (PLD) lies apart from all the other known deposition methods. The paper reviews the peculiarities of the cross-beam PLD (CBPLD), one of the most effective variant of high vacuum PLD with colliding ablation plumes. In addition to the reliable reduction of any form of macroparticle contamination it allows the fabrication of films with unexpected crystalline structure and unique physical properties, making the CBPLD a unique hyperthermal energy deposition technique.
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