Abstract
Following the recent development of Single Atom Transistors [1,2], we realized the first Coupled Atom Transistor in a small silicon nanowire MOSFET. Three independent gates control two donors connected in series between the source and the drain in a small volume of silicon. The devices, either implanted with Phosphorus (10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">24</sup> m <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> ) or Arsenic atoms, are fabricated with SOI technology on 200 and 300 mm wafers [3]. We observe resonant transport through two donors in series, and spectroscopy of a single donor state can be performed. We further demonstrate charge pumping and coherent electron exchange between the two donors involving Landau-Zener transitions.
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