Abstract
For several decades cold cathode gauges are widely used in vacuum systems for pressure measurement in the medium, high and ultra-high vacuum range. This type of ionization gauge is not only characterized by its wide measuring range, but also by its robustness and its relative low costs. Although cold cathode gauges have many advantages, however, it is known that the measuring accuracy of these instruments decreases with increasing operating time due to cathode sputtering and plasma-chemical reactions within the discharge cells causing contamination of the gauge. This effect, in turn, causes initial failures or disturbances in the pressure reading of these vacuum gauges.In this paper the contamination process is analyzed, the main causes for this perturbing effect are presented and a review of some promising methods for the reduction of the rate of contamination of cold cathode gauge heads are discussed.
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