Abstract
For several decades cold cathode gauges are widely used in vacuum systems for pressure measurement in the medium, high and ultra-high vacuum range. This type of ionization gauge is not only characterized by its wide measuring range, but also by its robustness and its relative low costs. Although cold cathode gauges have many advantages, however, it is known that the measuring accuracy of these instruments decreases with increasing operating time due to cathode sputtering and plasma-chemical reactions within the discharge cells causing contamination of the gauge. This effect, in turn, causes initial failures or disturbances in the pressure reading of these vacuum gauges.In this paper the contamination process is analyzed, the main causes for this perturbing effect are presented and a review of some promising methods for the reduction of the rate of contamination of cold cathode gauge heads are discussed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.