The concept of local work cells as the key element for computer automated process data logging and data management in the micro-electronic production industry

Abstract

ISO 9000 and Zero Defects are keywords in the Microelectronic and Electronic Manufacturing Industry today. To get certified for ISO 9000 or to achieve the zero defects goal means to establish online statistical process control and to analyse online the relevant production-, process- and quality-data. Here process data logging and process data management becomes a fundamental requirement on the way to the zero defects goal. In the past process data logging and data management were very expensive because of the hard- and software components involved. New softwaxe standards and software tools are now available for software integrators and the enduser. Based on the software standards - Relational Data Base Management, Unix, - TCP/IP Network, the concept of local work cell's was developed. The concept of local work cell's are now a keyelement for online process data logging and data management in the Microelectronic Manufacturing Industry.