Abstract
We systematically study the componential and morphological characteristics of Cu3N films induced by femtosecond laser irradiation on glass substrate. The experimental results demonstrate that with increase of laser power, significant changes on surface morphology can be observed, and coarse ripples structures present dominantly on film surfaces after irradiated by femtosecond laser. By XRD analysis of the treated sample area, componential evolutional process from the Cu3N to Cu can be revealed at with increase of laser power, which provides an attracting application prospect in the field of utilizing microelectronic devices.
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