Abstract

A model of charge state formation of particles sputtered of a metal surface bombarded by low energy multiple charged ions was proposed. It is based on the idea of sensitivity of electron exchange processes to the local surface electron density. The model describes the dependence of the degree of sputtered particle ionization on the charge and the initial energy of the bombarding ions. It has been found that a larger primary charge of bombarding ions causes a higher degree of ionization of sputtered particles. The results are in a good agreement with measurements.

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