Abstract

The charge effects in the low-energy carbon ion depositing process on a graphite surface were discussed by using an ab initio molecular orbital calculation with a UHF method and a 3-21G basis set. A positively charged carbon ion is strongly bound on a graphite surface by a covalent bond. A neutral carbon atom is adsorbed by a van der Waals interaction. A negatively charged carbon ion is not bound to a graphite surface and is repulsed. These charge effects are independent of the approach points of the incident carbon ion on a graphite surface.

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