Abstract
New experimental results concerning the model-independent unique characterization of SiGe/Si alloy multilayer structures are presented. The experimental technique uses x-ray diffracted intensity profiles collected for two different radiation wavelengths. The analytical method exploits the retrieval of the x-ray wave phase from its experimental intensity profile via a logarithmic Hilbert transform. High-resolution x-ray Bragg diffraction data have been collected at the European Synchrotron Radiation Facility. The physical dimensions and chemical composition of the SiGe alloy layers were determined with a record 15 Å spatial resolution.
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