Abstract

In this study, we propose one of the ultra-precision machining methods that can be adapted brittle material as well as soft material by using multi arrayed diamond tips and high speed spindle. Conventional machining method is too hard to control surface roughness and surface texture against brittle material because particles of grinding tools are irregular size and material can be fragile. Therefore we were able to design tool paths and machine controlled pattern on surface by multi arrayed diamond tips which has uniform size made in MEMS fabrication and high speed spindle of which maximum speed is about 300,000 rpm. We defined several parameters that can have effect on machining surface. Those are multi array of diamond tips (n * n), speed of the air spindle, and feeding rate. Surface roughness and surface texture can be controlled by those parameters for micro machining.

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