Abstract
Single and polycrystalline specimens of silver have been sputtered at pressures in the ranges 10–50×10 −3 and 0.1–1.0 × 10 · mm Hg. It has been shown that sputtering with helium, argon and xenon ions does not roughen the surface, but tends to make it smooth. Mercury and oxygen produce facets. A polycrystalline specimen sputtered with inert-gas ions develops steps at the boundaries between adjacent crystals. This is shown to be due to the sputtering rate being dependent on the orientation of the exposed crystal face.
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