Abstract
The calculated dependences and the results of modeling the process of the flow of a rarefied gas through the flow part of a turbomolecular vacuum pump with blades of variable thickness in a three-dimensional formulation of the problem solution are presented. The Monte Carlo method was used for modeling. The calculations trace the movement of each gas molecule from the inlet to the outlet of the pump with the calculation of the probabilities of their passage in the forward and reverse directions. The gas flow mode is molecular.
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