Abstract
In micro-electro-mechanical system (MEMS) containing moving components, there is a need to achieve low friction and high load support by lubrication. However, many researches were focused only on how to improve the lubrication by texturing surfaces of the lubricating siding contact. Only few works dedicated to the application of the slip on the surface resulted from the hydrophobic coating. In this study, the modification of surface in the lubricated sliding contact by applying the slip coating is of particular interest. The numerical simulations based on a modified Reynolds equation are performed. It is found that in a lubricated system, if one of the lubricated surfaces is treated as complex slip boundary, a higher load support as well as the flow rate with a reduced friction force is obtained.
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