The behavior of molecules in microwave-induced plasmas studied by optical emission spectroscopy. 2: Plasmas at reduced pressure

Abstract

The emission of various low-pressure microwave-induced plasmas created and sustained by a surfatron or by a Beenakker cavity has been studied after the introduction of molecular species (i.e. N 2, CO 2, SF 6 and SO 2). Only nitrogen yielded observable emission from the non-dissociated molecule (first and second positive system). Using other gases only, emission of dissociation and association products has been observed (i.e. atomic species, CN, C 2, CO, OH and NH). Studies of these intensities have been performed as functions of gas composition, pressure and position in the plasma and have provided an insight into molecular processes such as dissociation and association occurring in the plasma. It is found that parameters such as pressure and gas composition play a very important role with respect to these processes. Since no unambiguous relationship between the observed emission of dissociation or association products and the injected molecules has been found, it is established that it will be difficult to use microwave plasmas at reduced pressure as analytical excitation sources for molecular gas analysis.