Abstract
The axial gradient of planar RF plasmas produced by an even surface wave travelling between a pair of semi-infinite dielectric regions is obtained theoretically for two kinds of gas discharges, namely the so-called diffusion and recombination regimes. In this theory, two first-order approximations with respect to an electron-neutral species collision frequency for momentum transfer and the wave attenuation are employed to solve the electrostatic surface wave. Some typical characteristics are disclosed as follows. (i) The produced plasma density is expressed by a simple characteristic function for the two gas discharge regimes. (ii) The axial gradient of the plasma density is much less than that in the case of standard cylindrical tubes. The utilizability of the planar RF plasmas for industrial uses such as material processing by plasmas is discussed.
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