Abstract
This chapter discusses the atomic structure of amorphous carbon films. Mechanical properties of amorphous carbon films depend on methods and the amount of hydrogen atoms. It is necessary to clarify atomic structure and to understand the phenomena caused by the sliding friction and the mechanism. It was confirmed that an X-ray scattering of amorphous carbon thin film measured at the SPring8 can be measured to a level as accurate as 10 Å-1. AES–EEFLS of the latter is analyzed before and after the sliding friction, and it can be interpreted that the sliding friction causes a decrease in the amount of the sp2 bonding component or a disordering of the sp2 bond. The film of diamond-like carbon (DLC) became necessary for the development of products with stable quality using the excellent characteristics of non-crystalline carbon film. It is verified that measurements could be performed with good accuracy to 10Å-1 by grazing incidence X-ray scattering (GIXS) measurement method using high-intensity monochromatic incident light.
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