Abstract
The At-Wavelength Metrology Facility at BESSY-II is dedicated to short-term characterization of novel UV, EUV and XUV optical elements, such as diffraction gratings, mirrors, multilayers and nano-optical devices like reflection zone plates. It consists of an Optics Beamline PM-1 and a Reflectometer in a clean-room hutch as a fixed end station. The bending magnet Beamline is a Plane Grating Monochromator beamline (c-PGM) equipped with an SX700 monochromator. The beamline is specially tailored for efficient high-order suppression and stray light reduction. The versatile 11-axes UHV-Reflectometer can house life-sized optical elements, which are fully adjustable and of which the reflection properties can be measured in the full incidence angular range as well as in the full azimuthal angular range to determine polarization properties.
Highlights
The At-Wavelength Metrology Facility (Schäfers et al, 2016) consists of an Optics Beamline PM-1 (Sokolov et al, 2014) and a Re ectometer (Eggenstein et al, 2014, 2013) as a xed end station in a cleanroom surrounding
It is coupled to a versatile 4-circle UHV-Re ectometer as a permanent end station which is located in a moderate clean-room hutch and which allows to carry out Re ectometry experiments on a very high precision level
The beamline is matched to re ectometry requirements: Over the large operating range from 10 to 2000 eV this bending magnet beamline has very high spectral purity achieved by (1) a four-mirror arrangement of di erent coatings which can be inserted into the beam path at di erent angles and (2) by absorber lters for high order suppression
Summary
The At-Wavelength Metrology Facility (Schäfers et al, 2016) consists of an Optics Beamline PM-1 (Sokolov et al, 2014) and a Re ectometer (Eggenstein et al, 2014, 2013) as a xed end station in a cleanroom surrounding. The Plane Grating Monochromator beamline attached to a bending magnet is operated in collimated light (c-PGM) (Follath, 2001). The beamline is matched to re ectometry requirements: Over the large operating range from 10 to 2000 eV this bending magnet beamline has very high spectral purity achieved by (1) a four-mirror arrangement of di erent coatings which can be inserted into the beam path at di erent angles and (2) by absorber lters for high order suppression. The re ectivity can be measured in the full incidence angular range of 90° for both s- and p-polarization geometry by azimuthal rotation of the sample around the beam direction. A variety of in-situ exchangeable detectors with di erent angular resolution and dynamic range are available
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
