Abstract
Profile images of cylinders and spheres produced by conventional methods of optical inspection are frequently flanked by systems of interference fringes. This phenomenon is analysed theoretically and the results are confirmed by experiment. The conclusions are relevant not only to unfiltered inspection systems but also to those employing spatial filtering techniques. In discussing the latter, a distinction is drawn between thin specimens, for which the design of spatial filter is unrestricted, and those of finite radius, for which the filter design must be carefully optimized. It is shown that the central minimum of the spatially filtered pattern delineates the true edge only if the radius of the specimen is zero. In other circumstances the positional error is a function of the cube root of the radius of the specimen and is predictable. The applicability of spatial filtering to profile microscopy and profile projection is discussed. Photographic examples of screw-threads taken with two-dimensional filters...
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