Abstract
A new generation of solid state sensors based on nanocrystalline BaTiO 3 films containing various semiconducting oxides has been developed. The sensors were fabricated from BaTiO 3-based nanopowder mixtures using thick film technology and were characterized regarding their CO 2-gas sensitivity at different operation temperatures and gas environments. It was found that the sensors operate over a wide range of CO 2 concentrations. Interfering gases have only minor effects on the sensor response. By using miniaturized Al 2O 3-substrates as carriers for the sensitive nanocrystalline layer a significant decrease of the power and powder consumption for each sensor was achieved.
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