Abstract
The main goal of the work is to develop a novel technique for the production of improved Gas Electron Multiplier (GEM) microstructures that are critical elements of particle detectors used for High Energy Physics research. Invented at CERN, the Micro-Chemical-Vias (MCV) technology has proven optimal for producing high volumes of large size GEMs elements. We aim to develop a technology for the production of GEMs with higher vias densities, increasing the gain of a single structure and ensuring better system reliability. Additionally, different conductive layers are planned for use. Tests were carried out using Low-Temperature Cofired Ceramics (LTCC) and various types of conductive layers.
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