Abstract
The high brightness of liquid metal field emission sources makes them uniquely suited to the production of mufocused ion beams. A gallium liquid metal ion source has been succesfully incorporated in a commercial ion-probe system (V G SIMSLAB). The source is fitted to an electrostatic ion-optical column with two einzel lenses, scan rods and quadrupole stigmators: a condenser lens allows the final probe current to be set in the range 50 pA–100 nA, while a final lens allows a minimum probe diameter approaching 0.1 μm at 10 keV energy (at | probe ≈ 50 pA). Ion energy can be varied from less than 1 to 10 keV while maintaining stabilized emission from the source. Secondary ion mass spectra and images have been obtained using gallium ions from a wide range of materials (semiconductors, catalysts and metals). High secondary yields for Glds for Ga + ions allow TV rate display of secondary electron images, detected using a scintillator and photomultiplier: using a quadrupole mass spectrometer secondary ion maps are obtained in typically 40–300 s. The secondary ion maps show the same limiting spatial resolution as the secondary electron images, and can be readily obtained from insulating samples using low energy electrons to neutralize surface charging.
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