Abstract
According to the positioning accuracy requirements of the two-dimensional precision positioning system, a two dimensional intelligent positioning control system is used in our study. The precision positioning experiment is also conducted. The experimental result shows that the positioning accuracy and the dynamic performance of the fuzzy neuron self-adaptive PID control system in high-speed movement are better than that of the traditional PID control system in the same stage. For a random point on a carrying board of 250 mm by 250 mm, the intelligent control can ensure that the repeated positioning error of this point is less than 1 um within the range of 300 mm by 300 mm under the design load.
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