Abstract
Using the high precision three-dimension thermal deformation measurement equipment, the data of differential linear expansion coefficient of several materials used in microwave equalizer were got, and the thermal deformation of resonant cavity and the probe of typical structural were measured exactly. Therefore, the internal relationship between the thermal deformation and the shift of equalized property can be concluded. According to the precise data of the thermal deformation measured, the methods, such as materials compensation and structural compensation, were used to guarantee the properties of equalizer at different working temperatures.
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