Abstract

To clarify the so-called supermodulus effects in Ag/Pd multilayer films (MLFs), we carried out a re-examination using an advanced vibrating-reed technique. Young's modulus E along the layer plane has a value E b for the wavelength γ ⩾ 6 nm, where E b is the E value expected in a homogeneous AgPd alloy. For γ ⩽ 5 nm, E for Ag/Pd MLFs has a general tendency of increase with decreasing γ, and also two maxima beyond 2 E b at around γ = 2.1 and 2.8 nm. The increased E observed in the as-deposited state is decreased to E b after homogenization of Ag/Pd MLFs at elevated temperatures, suggesting that the enhancement of E found here reflects the intrinsic-elastic property of Ag/Pd MLFs.

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